多层UV-LIGA电铸镍材料的抗冲击性能

Anti-impact material properties of UV-LIGA multi-layered electroformed nickel

为研究采用UV-LIGA（Ultraviolet Lithography,Galvanoformung,Abformung）技术制作的多层电铸镍的机械可靠性,对其进行了抗冲击性能分析。利用冲击试验台及信号采集系统测试了UV-LIGA多层电铸镍的抗冲击性能。实验分析得到其累积失效概率-加速度峰值曲线近似拟合于韦布尔统计分布,韦布尔系数γ=7.6,参考加速度为21 300g。当加速度为12 000~18 000g时,可靠性相对较高;当加速度为12 000~18 000 g时,累计失效概率增加较快;当加速度大于24 000g时,可靠性下降迅速。利用扫描电子显微镜（SEM）观察了试样,得到其主要的失效形式有分层、断裂、塑性变形以及黏连等。初步分析了失效原因,并提出了相应的优化设计方法,为UV-LIGA多层结构的设计提供实验依据。

To explore the mechanical reliability of multi-layered electroformed nickel prepared by UVLIGA（Ultraviolet Lithography, Galvanoformung, Abformung） multi-layered manufacturing technology,the anti-impact material properties of the multi-layered electroformed nickel were analyzed.High-speed impact tests for the multi-layered electroformed nickel were completed by adopting an impact testing device and a signal acquisition system.The experimental results show that the cumulative failure probability-peak acceleration curve approximately fits the Weibull statistical distribution,the Weibull coefficient is 7.6and the reference acceleration is 21 300 g.When the acceleration is 12 000-18 000 g,it shows a higher reliability;when that is 12000-18 000 g,the cumulative failure probability increases greatly;however the reliability is declines rapidly at acceleration more than 24000 g.A Scanning Electron Microscopy（SEM）was used to observe the samples and the results show that the delamination,fracture,plastic deformation and adhesion are the main failure modes.Finally,the failure causes were analyzed and corresponding optimization methods were proposed to improve the process of UV-LIGA multi-layered electroformed nickel,which verifiesthat the experiments provide bases for design of a multi layer structure of UV-LIGA.