摘要
基于三波长正交的特性和强度解调的原理,设计搭建了一种针对EFPI(非本征型法布里-珀罗干涉型传感器)的解调系统。利用相位实时补偿的方式,该解调系统克服了传统强度解调中腔长解调范围受限的缺点,同时兼具解调速度快的优点。在瞬间释压实验中,结果表明该解调系统实现了腔长变化范围大于1μm的解调,且解调腔长精度达到0.01μm。在高频正弦电压驱动实验中,该系统可成功分辨频率为5 k Hz的信号,且解调精度为0.01μm。
Based on the generation of three quadrature phase-shifted signals and the principle of intensity demodulation,a new system was built up to demodulate the Extrinsic Fabry-Perot Interferometer sensor. With the continuous monitoring of phase changes,it successfully overcome the limited demodulation range of traditional intensity demodulation. Meanwhile,it had the potential of the high speed measurement. The experimental results show that the sensing accuracy is higher than 0. 01 m over a large scope of1 m. In high speed measurement experiment,it can realize the frequency at least 5 k Hz and the accuracy of 0. 01 μm is reached.
出处
《仪表技术与传感器》
CSCD
北大核心
2016年第3期61-64,共4页
Instrument Technique and Sensor
基金
航空科学基金项目(2013ZD51)
关键词
EFPI
强度解调
解调系统
动态大范围
高速
extrinsic Fabry-Perot interferometer sensor
intensity demodulation
demodulation system
dynamic large scope
high speed
