ZnO纳米阵列结构酒精气敏特性研究

Gas Sensing Property of ZnO Nanowires Array for Ethanol

为了提高ZnO气敏元件对酒精蒸汽的气敏响应,改善气敏元件的稳定性及耐久性,文中采用化学水热法在预处理后的陶瓷管电极表面生长ZnO纳米阵列材料,通过退火处理后得到薄膜ZnO气敏元件.借助X射线衍射仪和扫描电子显微镜对所得产物的晶体结构和形貌进行表征.采用静态配气法对其进行不同浓度(1×10-4,2×10-4,5×10-4,1×10-3)的酒精蒸汽气敏性能测试.实验结果表明:该结构为分散均匀的ZnO纳米线阵列状结构,该纳米结构薄膜气敏元件具有较好的气敏性能,具有较快的响应及恢复.随环境中酒精蒸汽浓度的增加,其气敏性能逐步提升,在5×10-4酒精蒸汽气敏浓度下气敏性能达到峰值.不同浓度条件下,气敏响应及恢复时间不同,在1×10-4条件下度响应时间最快,1×10-3浓度下恢复时间最快,2×10-4浓度下响应恢复时间最均衡.

The study aims to improve the gas-sensing response of ZnO gas sensors to ethanol and their stability and durability.ZnO nanowire array grew on the surface of a ceramic tube electrode by using the chemical hydrothermal method.The gas sensor was obtained by annealing treatment.Its microstructure and phase were investigated by SEM and X-ray diffraction analysis.And the gas-sensing property was also investigated by using static volumetric method in different gas concentrations（1×10^-4,2×10^-4,5×10^-4,1×10^-3）.The result shows that the ZnO nanowires array structure is dispersed evenly and this ZnO thin-film gas sensor has good gas-sensing performance. With the increase of alcohol vapor concentration in the environment,its gas-sensing performance improves gradually.The gas-sensor attains its maximum performance in the 5×10^-4 of alcohol steam.With different concentrations,the gassensing response and recovery time are different.The fastest response time is obtained in the 1×10^-4.And the recovery time is the fastest in the concentration of 1×10^-3.The property of the gas sensor is balanced in 2×10^-4.