射频感应耦合等离子体模式转变的发射光谱

Mode Transition of RF Inductively Coupled Plasma by Emission Spectroscopy

通过改变气体流率、放电气压和气体组成,研究射频感应耦合放电等离子体(inductively coupled plasma,ICP)在圆柱型放电装置中E模到H模的转化规律.采用发射光谱诊断法,对419.8 nm氩原子谱线和434.8 nm氩离子谱线进行采集和分析,以表征E模到H模的转换功率.当放电气压为60 Pa时,E-H转换功率最小;在Ar中加入He对E-H转换功率几乎没有影响,而加入N2后,E-H转换功率发生了明显的改变;随着氩气流率的增加,E-H转换功率在不断减小.结果表明:射频感应耦合放电等离子体E模到H模的转化是一个突然变化的过程,转换功率会因不同的气体流率、放电气压和气体组成而变化.

The paper studied the conversion law of E mode to H mode in inductively coupled plasma（ ICP） discharge device in a cylindrical discharge device,by changing the gas flow rate,discharge pressure and gas composition. An emission spectrum diagnosis method was adopted,and the 419. 8 nm argon atomic spectrum and 434. 8 nm argon ion spectrum were collected and analyzed to characterize the transition power of E to H mode. Results show that when the discharge pressure is 60 Pa,the transition power E-H is minimum; adding He in Ar does not affect the E-H transition power,and after adding N2,the E-H transition power has changed obviously. With the increase of the argon flow rate,the E-H transition power decreases. The conversion of E mode to H mode is a sudden change process in radio frequency inductively coupled plasma discharge. The transition power varies with different gas flow rates,discharge pressures and gas compositions.