TMR单芯片微弱电流传感器的研制

Study and manufacture of TMR single chip weak current sensor

针对微弱电流的检测,提出了一种单芯片微弱电流传感器,其原理是:利用隧道磁电阻(TMR)元件作为磁场敏感元件,并将电流导体和TMR元件进行集成,以减小电流导体与磁场敏感元件的间距,提高电流测量的分辨率。结合MEMS工艺,通过优化设计TMR元件结构和电流导体结构,研制出了电流分辨率达到20μA的微弱电流传感器,为微弱电流检测提供了一种有效、廉价的解决方案。

In this research,we obtained a single chip sensor for weak current detection.The working principle of this sensor is utilizing the TMR device as magnetic field sensing unit,and integrating current conductors with TMR element to reduce the distance between the current conductors and magnetic field sensitive device,so as to improve the resolution in current detection.We fabricated a weak current sensor with the resolution of 20μA using MEMS process by optimizing the structure of both TMR device as well as current conductors.This current sensor offers a promising and economic solution for weak current detection.