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Profilometry with Grating Projection Based on One-step Phase Shift 被引量:1

Profilometry with Grating Projection Based on One-step Phase Shift
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摘要 An optical technique for 3 D shape measurement is presented. This technique, based on a deformed projected grating pattern which carries 3 D information of the measured object, can automatically and accurately obtain the phase map of a measured object by using one step phase shift algorithm.In comparison with traditional phase shift technique, the technique is much faster, with the equivalent accuracy. Only one frame image is sufficient for measuring. Experimental result of typical object is presented. An optical technique for 3 D shape measurement is presented. This technique, based on a deformed projected grating pattern which carries 3 D information of the measured object, can automatically and accurately obtain the phase map of a measured object by using one step phase shift algorithm.In comparison with traditional phase shift technique, the technique is much faster, with the equivalent accuracy. Only one frame image is sufficient for measuring. Experimental result of typical object is presented.
出处 《Semiconductor Photonics and Technology》 CAS 2001年第3期189-192,共4页 半导体光子学与技术(英文版)
关键词 3-D surface contouring Phase shift Profilometry of projected grating 三维表面轮廓 相移 表面光度测定法 光栅投影
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参考文献5

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同被引文献6

  • 1陈文静,苏显渝,曹益平,向立群.傅里叶变换轮廓术中抑制零频的新方法[J].中国激光,2004,31(6):740-744. 被引量:30
  • 2Yamaguchi I, Ohta S, Kato J. Surface contouring by phase-shifting digital holography[J]. Opticsand Laser in Engineering, 2001, 36:417 -428.
  • 3Takeda M, Mutoh K. Fourier transform profilometry for the automatic measurement of 3D object shapes[J]. Appl Opt, 1983, 22(24): 3977-3982.
  • 4Freischlad K R. Interferometer light source: United States Patent, 6061133[P]. 2000.
  • 5Freischlad K R. Extended source low coherence interferometer for flatness: United States Patent, 5737081[P]. 1998.
  • 6Deck L L. Apparatus and method for reducing the effects of coherent artifacts in an interferometer: United States Patent, 6643024[P]. 2003.

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