孔道限域催化体系对甲烷传感器响应性能的改善

Improvement of response performance of methane sensor in pore limit area catalytic system

针对传统甲烷催化传感器中催化剂活性低的问题,研制了一种定向氧化铝纳米管限域Pd体系的催化传感器,采用二次阳极氧化法制备三种孔径的Al_(2)O_(3)陶瓷基板,借助COMSOL Multiphysics软件仿真分析芯片的热场,通过浸渍法测试了催化元件的电压与温度响应特征。结果表明:300 nm孔径基板工作温度分布均匀,正面温度最大差距为4℃,应力最大可达223 MPa;传感器的灵敏度与温升梯度均随着孔径的增加,两者同步升高。Pd粒子限域在Al_(2)O_(3)的纳米孔道内部越多,所制作的传感器性能越好,说明该纳米管体系能够对甲烷产生高效催化反应。

This paper proposes a catalytic sensor with a restricted Pd system of oriented alumina nanotubes as an alternative to traditional methane catalytic sensors with lower catalyst activity.The study preparing Al_(2)O_(3)ceramic substrates with three pores using the secondary anodic oxidation method;simulating and analyze the thermal field of the chip using COMSOL Multiphysics software;and supporting the catalyst by impregnation method,and testing the voltage and temperature response characteristics of the catalytic element.The results show that the 300 nm aperture substrate has uniform working temperature distribution,with the maximum difference of 4°C for front temperature,and 223 MPa for the maximum stress;The sensor sees a synchronous increase in the sensitivity and temperature gradient with the increasing aperture.Combined with material characterization and analysis,the more Pd particles confined inside Al_(2)O_(3)is associated with the better performance of the fabricated sensor,showing that the nanotube system enables a high-efficiency catalytic reaction to methane.