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Optical transmitter module with hybrid integration of DFB laser diode and proton-exchanged LiNbO_(3)modulator chip

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摘要 In this work,a hybrid integrated optical transmitter module was designed and fabricated.A proton-exchanged Mach–Zehnder lithium niobate(LiNbO_(3))modulator chip was chosen to enhance the output extinction ratio.A fiber was used to adjust the rotation of the polarization direction caused by the optical isolator.The whole optical path structure,including the laser chip,lens,fiber,and modulator chip,was simulated to achieve high optical output efficiency.After a series of process improvements,a module with an output extinction ratio of 34 dB and a bandwidth of 20.5 GHz(from 2 GHz)was obtained.The optical output efficiency of the whole module reached approximately 21%.The link performance of the module was also measured.
出处 《Journal of Semiconductors》 EI CAS CSCD 2022年第6期34-39,共6页 半导体学报(英文版)
基金 This work was supported by National Key Research and Development Program of China(2018YFB2201101) the Strategic Priority Research Program of Chinese Academy of Sciences,Grant No.XDB43000000 Beijing Municipal Science&Technology Commission,Administrative Commission of Zhongguancun Science Park No.Z201100004020004。
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