Optical properties of He^(+)-implanted and diamond blade-diced terbium gallium garnet crystal planar and ridge waveguides

Terbium gallium garnet(Tb_(3)Ga_(5)O_(12),TGG)crystal can be used to fabricate various magneto-optical devices due to its optimal Faraday effect.In this work,400-keV He^(+)ions with a fluence of 6.0×10^(16)ions/cm^(2)are irradiated into the TGG crystal for the planar waveguide formation.The precise diamond blade dicing with a rotation speed of 2×10^(4)rpm and a cutting velocity of 0.1 mm/s is performed on the He^(+)-implanted TGG planar waveguide for the ridge structure.The darkmode spectrum of the He^(+)-implanted TGG planar waveguide is measured by the prism-coupling method,thereby obtaining the relationship between the reflected light intensity and the effective refractive index.The refractive index profile of the planar waveguide is reconstructed by the reflectivity calculation method.The near-field light intensity distribution of the planar waveguide and the ridge waveguide are recorded by the end-face coupling method.The He^(+)-implanted and diamond blade-diced TGG crystal planar and ridge waveguides are promising candidates for integrated magneto-optical devices.