柔性AZO/Cu/AZO/CTO薄膜的太阳阻隔及红外隐身性能的研究

Study of solar barrier and infrared stealth properties offlexible AZO/Cu/AZO/CTO films

采用磁控溅射的方法在PET衬底上制备了AZO/Cu/AZO/CTO薄膜,系统研究了CTO(CeO_(2)-TiO_(2))层厚度对AZO/Cu/AZO/CTO薄膜的微观结构、光学性能、红外发射率和导电性的影响。结果表明,随着CTO层厚度的增加,多层膜的带隙变窄,紫外阻隔率和近红外阻隔率提高,可见光透过率降低。同时,CTO层有利于降低多层膜的表面电阻和红外发射率。当CTO层厚度为34.2 nm时,多层膜的紫外阻隔率为92.0%,近红外阻隔率为46.5%,可见光透过率为62.5%,8~14μm红外发射率为0.163,因此AZO/Cu/AZO/CTO薄膜具有光谱选择性和低的红外发射率,是一种有潜力的太阳阻隔膜和红外隐身材料。

AZO/Cu/AZO/CTO films were prepared on PET substrates by magnetron sputtering.The effects of CTO(CeO_(2)-TiO_(2))layer thickness on the microstructure,optical properties,infrared emissivity and conductivity of AZO/Cu/AZO/CTO films were systematically studied.With the increase of CTO layer thickness,the band gap becomes narrower,the UV blocking rate and near-infrared blocking rate is improved,and the visible light transmittance is reduced.At the same time,the CTO layer is beneficial to reduce the surface resistance and infrared emissivity of the multilayer film.When the thickness of CTO layer is 34.2 nm,the UV blocking rate is 92.0%,the infrared blocking rate is 46.5%,the visible light transmittance is 62.5%,and the infrared emissivity in 8-14μm is 0.163.Therefore,the AZO/Cu/AZO/CTO film has spectral selectivity and low infrared emissivity,which is a potential solar barrier and infrared stealth material.