柔性AZO/NiCr/Ag/NiCr/AZO透明导电玻璃结构对性能的影响

Effect of Flexible AZO/NiCr/Ag/NiCr/AZO Transparent Conductive Glass Structure on Properties

目的室温制备柔性透明导电玻璃并提高其光电性能。方法采用直流磁控溅射法,以柔性玻璃为基底,在室温下沉积(Aluminum-doped ZnO,AZO)/NiCr/Ag/NiCr/AZO多层结构透明导电玻璃。通过探针轮廓仪测试、X射线衍射仪(X-ray diffraction,XRD)测试、拉曼光谱仪测试、分光光度计测量、四探针测试和霍尔效应测试,分别获得了样品的各层薄膜厚度、X射线衍射图谱、拉曼光谱、透光率、方块电阻和电学性能。经过参数优化,选取Ag膜厚度为3~15 nm的样品,研究Ag膜厚度对玻璃样品的结构特征及光电性能的影响。结果样品光电性能与Ag层厚度密切相关,随着中间Ag层厚度的增加,样品在380~760 nm波长范围内的平均光透光率先增加后降低,吸收边依次发生了红移,样品的方块电阻则随着Ag层厚度的增加单调减小。Ag膜厚度为12 nm的样品综合光电性能最佳,其平均透光率为82.4%,载流子浓度为8.32×10^(21) cm^(‒3),载流子迁移率为8.21 cm^(2)/(V·s),电阻率为9.15×10^(‒5)Ω·cm,方块电阻为8.8Ω/sq,品质因子可达16.4×10^(–3)Ω^(–1)。结论说明可以通过透明导电薄膜结合金属薄膜在室温下获得柔性透明导电玻璃,并具有较好的透光性能和导电性。

In recent years,flexible electronic products,flexible transparent organic solar cells,large size flexible flat panel display,energy-saving infrared reflection film,intelligent color changing window,etc.,the demand for flexibletransparent conductive glass is increasing.Due to the requirements of high resolution,energy saving,low cost,bending resistance and strong adhesion,flexible transparent conductive glass needs to be obtained at room temperature with high light transmittance,low resistivity and strong adhesion.Therefore,it has become a research hotspot to prepare flexible transparent conductive glass at room temperature and the improve its photoelectric properties.In this study,AZO/NiCr/Ag/NiCr/AZO multilayer transparent conductive glass was deposited on flexible glass substrate by DC magnetron sputtering at room temperature.The film thickness,X-ray diffraction pattern,Raman spectrum,square resistance and electrical properties of the samples were obtained by probe profilometer test,X-ray diffractometer(X-ray diffraction,XRD)test,Raman spectrometer test,spectrophotometer test,four-probe test and Hall effect test.After the matching study of the multilayer composite film,it is found that the light transmittance of the multilayer transparent conductive glass with interfacial layer NiCr film is better.Therefore,AZO/NiCr/Ag/NiCr/AZO transparent conductive glass samples with 3-15 nm Ag film thickness were selected to study the effects of Ag film thickness on the structural characteristics and optoelectronic properties of the glass samples.The results show that the photoelectric properties of AZO/NiCr/Ag/NiCr/AZO transparent conductive glass are closely related to the thickness of Ag layer.When the thickness of Ag film is 3 nm,it is a discrete island structure growth mode,and the thickness of Ag film increases gradually.According to the experimental results and the research of other teachers,it is inferred that the critical thickness of Ag film is about 9 nm.With the continuous increase of the thickness of the intermediate Ag layer,the Ag layer becomes a continuous film,and the internal defects of the sample are reduced.The average light transmittance of the sample in the wavelength range of 380 to 760 nm increases at first and then decreases.The absorption edge of the sample is red-shifted in the range of 320-400 nm,indicating that the optical band gap of transparent conductive glass decreases with the increase of the thickness of Ag film.The square resistance of the sample decreases monotonously with the increase of the thickness of Ag layer,and the quality factor increases at first and then decreases.The sample with 12 nm Ag film thickness has the best comprehensive optoelectronic properties,with an average light transmittance of 82.4%,a carrier concentration of 8.32×10^(21) cm^(‒3),a carrier mobility of 8.21 cm^(2)/(V·s),a resistivity of 9.15×10^(‒5)Ω·cm,a square resistance of 8.8Ω/sq,and a quality factor of 16.4×10^(–3)Ω^(–1).The results show that the flexible transparent conductive glass can be obtained by combining transparent conductive film with metal film at room temperature.the film structure and thickness matching have a direct influence on the light transmittance and conductivity of flexible transparent conductive glass.The experimental results show that the flexible transparent conductive glass with comprehensive optoelectronic properties can be obtained through the design of the film and the study of preparation technology.In the future research,the matching and technical optimization of multilayer composite films will continue to be carried out to find the composite structure with better performance.