高带宽压电片变形镜的动力学仿真与优化方法研究

Research on dynamics simulation and optimization method for high-bandwidth unimorph piezoelectric deformable mirror

为进一步提高压电波前校正器的响应速度和轻量化程度,对面向高动态形状控制的压电片变形镜的动力学仿真与优化方法进行了研究。首先,基于压电片变形镜的参数化有限元模型,提出了高效、高精度的电-力耦合动力学仿真分析方法。然后,通过正交遍历多维设计参数(光学反射镜与压电陶瓷的材料类型、几何尺寸和固定方式等),探究了不同参数对压电片变形镜动态形状控制性能的影响规律。最后,优化得到具有预期响应带宽和驱动位移性能的压电片变形镜设计方案,并通过制备压电片变形镜的原理样件来验证其性能。实验结果表明,所研制的压电片变形镜的固有频率和镜面驱动位移幅值符合预期,验证了所提出的动力学仿真与优化方法的有效性,这可为高带宽压电片变形镜的高效研制提供科学的理论方法。

In order to further improve the response speed and lightweight extent of piezoelectric wavefront correctors,the dynamics simulation and optimization method of unimorph piezoelectric deformable mirrors for high dynamic shape control was studied.Firstly,based on the parameterized finite element model of unimorph piezoelectric deformable mirror,an efficient and high-precision electromechanical coupling dynamics simulation analysis method was proposed.Then,through orthogonal traversal of multi-dimensional design parameters(material type,geometric dimension and fixation mode of the optical reflector and piezoelectric ceramic),the influence of different parameters on the dynamic shape control performance of unimorph piezoelectric deformable mirrors was explored.Finally,the optimized design scheme of the unimorph piezoelectric deformable mirror with expected response bandwidth and actuation displacement performance was obtained.The experimental results show that the natural frequency and mirror actuation displacement amplitude of the developed unimorph piezoelectric deformable mirror are in line with expectations,which verifies the effectiveness of the proposed dynamics simulation and optimization method and provides a scientific theoretical method for the efficient development of high-bandwidth unimorph piezoelectric deformable mirrors.