面向复杂微装配的宏微视觉单元

Macro and micro vision unit for complicated microassembly

针对复杂微装配中视觉高分辨率和大视野难以兼顾的问题,基于无限远成像原理研制了一种宏微视觉单元,通过调配后端的镜筒透镜实现单物镜双通道变倍成像。对宏微视觉单元进行像质评价和精度测试,测试结果表明:在保证工作距离和视野的前提下,宏微视觉单元的测量精度优于0.5μm;测量运动定位的精度优于2μm。最后,利用研制的宏微视觉单元搭建了微装配实验平台,通过在宏成像下姿态调整和微成像下位置对准两步操作,实现了微流控芯片流道和检测光纤的对准连接,表明研制的宏微视觉单元可以胜任同时需要高分辨率和大视野的复杂微装配视觉引导任务。

Aiming at the problem that it is difficult to balance high resolution and wide view field in complicated microassemply,a macro and micro vision unit is developed based on the principle of infinitely distant imaging,in which the imaging of double optical paths is realized by the combination of two tube lenses with a single objective lens.The imaging quality of macro and micro vision unit is evaluated and precision test.Test results show while ensuring the working distance and field of vision,the measurement precision of macro and micro vision is prior to 0.5μm and the precision of motion positioning is prior to 2μm.At last,the experimental platform for microassembly is built up with the developed macro and micro vision unit.With this platform,the alignment connection between detection fiber and a micro channel in a microfluidic chip is realized,through the two-step operation of attitude adjustment under macro imaging and position alignment under micro imaging.It shows that the developed macro and micro vision unit can be utilized for these complex microassembly vision guidance tasks that require both the high resolution and the wide field.