高频动态压电式压力传感器结构设计与实验研究

Structural Design and Experimental Study of High Frequency Dynamic Piezoelectric Pressure Sensor

针对激波压力信号快速测量需求的提升,提出了一种基于压电效应的高频动态激波压力传感器结构形式及测量原理。通过分析激波信号的时频特性,确定高频动态压电式压力传感器的性能需求;采用高频动态压电式压力传感器的测量原理,对提出的激波压力测量进行了分析;基于变形协调一致原则,建立了静力学和动力学模型,分析传感器结构参数对灵敏度和固有频率的影响规律;将优化后的传感器三维模型导入ANSYS中进行静力学、动力学和压电耦合分析,验证了传感器结构及其测量原理的可行性。通过准静态标定和动态标定实验,得到传感器的电压灵敏度、非线性度和固有频率等测量性能指标,实验结果表明:研制的高频动态压电式激波压力传感器样机具有高灵敏度3.19 mV/kPa、高固有频率特性95.625 Hz和短上升时间10.45μs特性,能够满足实际测试需求。

The structure and measurement principles of a high-frequency dynamic piezoelectric shock wave pressure sensor based on piezoelectric effect are proposed in response to the increasing demand for fast measurement of shock wave pressure signals.The performance requirements of the high-frequency dynamic piezoelectric pressure sensor are determined by analyzing the time-frequency characteristics of shock wave signal.The measurement principle of the high-frequency dynamic piezoelectric pressure sensor is used to analyze the proposed shock wave pressure measurement.Based on the principle of deformation coordination and consistency,static and dynamic models are established to analyze the influence of sensor structural parameters on sensitivity and natural frequency.The optimized three-dimensional model of the sensor is imported into ANSYS for static,dynamic,and piezoelectric coupling analyses,and the feasibility of the sensor structure and its measurement principle is verified.Through quasi-static and dynamic calibration experiments,the measurement performance indicators of the sensor,such as voltage sensitivity,nonlinearity,and natural frequency,are obtained.The experimental results show that the developed prototype of the high-frequency dynamic piezoelectric shock wave pressure sensor has high sensitivity:3.19 mV/kPa,high natural frequency characteristic:95.625 Hz,and short rise time:10.45μs,which can meet the requirements in actual tests.