微克飞行器MEMS气动控制微系统

MEMS Pneumatic Control Microsystem for Microgram Aircraft

针对微克飞行器对毫米级的控制系统的需求,借助MEMS技术,提出一种微型化的气动控制系统。借助蠕动电极可累积作用效果的特点,使控制系统在力与体积之间达到良好的平衡,达到在小体积内获得高驱动力的目标,通过理论分析和尺寸优化完成结构的设计,并进行有限元仿真分析。仿真结果表示,最终设计的微系统面积为22 mm×12 mm,可以产生433 mN的驱动力,可使控制面实现偏转角在12°范围内的角度调控。

Aiming at the requirement of pico air vehicle for millimeter level control systems,a new design scheme for pneumatic control microsystems was proposed with MEMS technology.By utilizing the cumulative effect of peristaltic electrodes,the control system achieves a good balance between force and volume,achieving the goal of achieving high driving force in a small volume.The structural design was completed through theoretical analysis and size optimization,and finite element simulation analysis was conducted on it.The simulation result showed that the final designed microsystem area was 22 mm×12 mm,which could generate a driving force of 433 mN and enable the control surface to achieve angle adjustment within the range of 12 degree deviation angle.