压电驱动在超精密加工领域的应用现状与发展趋势综述

Review of Application Status and Development Trend of Piezoelectric Drive in Ultra-precision Machining

超精密加工中,为实现微/纳米级的加工精度,必须提供更高精度的驱动装置和控制技术。压电驱动具有精度高、振动频率高、力密度高、响应快、无电磁干扰、能断电自锁和优良的环境适应性等优点,被广泛应用在超精密加工领域,已成为超精密加工技术中的一项核心关键技术。首先系统阐述了压电驱动技术的致动原理、分类和特点,对压电驱动的致动原理和发展现状进行了分析;然后从加工、定位和抑制振动3个方面介绍了压电驱动技术在超精密加工中的应用现状,最后对压电驱动技术的发展方向进行了讨论及展望。

In the field of ultra-precision machining,to realize micro/nano level machining precision,it is necessary to provide higher precision drive device and control technology.Piezoelectric drive has the advantages of high precision,high vibration frequency,high force density,fast response,no electromagnetic interference,power off self-locking and excellent environmental adaptability,and is widely used in the field of ultra-precision machining,and has become a core key technology in ultra-precision machining technology.Actuating principle,classification and characteristics of piezoelectric drive technology are described systematically,the actuation principle and development status of piezoelectric drive are analyzed,and then the application status of piezoelectric drive technology in ultra-precision machining is introduced from three aspects:processing,positioning,and vibration suppression.Finally,the development direction of piezoelectric drive technology is discussed and prospected.