MEMS微热板结构设计与仿真

Structure design and simulation of MEMS micro-hotplate

微热板作为很多微机电系统(MEMS)传感器和执行器的基础结构,对器件性能影响极大,在气体传感器、燃料电池等领域都有着重要的应用。本文提出了几种悬浮式结构的微热板设计,并利用有限元分析方法(FEA),在气体传感器常用的工作温度400℃下,从热稳定性、机械稳定性、功耗和效率多方面对微热板进行了仿真,结果表明:螺旋形微热板的综合性能更好。进一步对可能影响微热板性能的多个因素,如电极电压、支撑层厚度、微加热器线宽间距比等进行了优化,获得了综合性能最优的微热板图形及参数设计。

As the basic structure of many MEMS sensors and actuators,micro-hot plates have a great impact on device performance and thus have important applications in many fields,such as gas sensors,fuel cells.Several micro-hot plates with different suspended membrane structures are proposed.Finite element analysis(FEA)method is used to simulate the micro-hot plates in terms of thermal stability,mechanical stability,power consumption and efficiency at the common operating temperature of 400℃ of gas sensors.The results show that the spiral-shaped micro-hot plate has better overall performance.Several parameters that may affect the performance of the micro-hot plate,such as electrode voltage,support layer thickness,and microheater line width,are further optimized,obtain graph structure and parameter design of micro-hotplate with the optimal comprehensive performance.