Al纳米孔阵列/(Al_(x)Ga_(1-x))_(2)O_(3)薄膜中的紫外波段超常透射

Extraordinary transmission in ultraviolet band in(Al_(x)Ga_(1-x))_(2)O_(3)/Al nanopore array

采用有限差分时域算法计算(Al_(x)Ga_(1-x))_(2)O_(3)薄膜衬底上的周期性三角晶格Al纳米孔阵列的透过率,研究不同(Al_(x)Ga_(1-x))_(2)O_(3)衬底的Al组分x以及Al纳米孔阵列的厚度、孔径和周期对其光学传输特性的影响.数值计算结果表明,当x=0时,在263 nm和358 nm波长范围处出现两个强透射峰,随着x的增大,其中位于263 nm处的透射峰发生轻微蓝移,强度则先增强后下降;358 nm处的透射峰发生明显蓝移且不断加强.若纳米孔阵列的周期不变,随着空气柱孔径增大时,紫外波段两强透射峰峰值位置分别位于244 nm和347 nm处,两峰均先发生红移再蓝移,透过率不断增大,反射率减小.随着周期扩大,紫外波段两强透射峰分别位于249 nm和336 nm处,两透射峰均发生明显红移,其中249 nm处的透射峰红移至304 nm,336 nm处的透射峰红移至417 nm,并且透过率不断降低.随着Al厚度的增大,位于380 nm处的透射峰峰值位置发生蓝移,且透过率不断下降.本文数据集可在https://doi.org/10.57760/sciencedb.j00213.00036中访问获取.

The finite difference time domain method is used to compute the transmissions of periodic triangular-lattice Al nanopore arrays on(Al_(x)Ga_(1-x))_(2)O_(3)thin film substrates.The influences of Al component x in(Al_(x)Ga_(1-x))_(2)O_(3)substrate,and the thickness,aperture and period of Al nanopore array on their optical transmission behaviors are studied systematically.The numerical results indicate that when x=0,there are two strong transmission peaks at 263 nm and 358 nm,respectively.As x increases,the transmission peak at 263 nm exhibits a slight blue-shift,with intensity first increasing and then decreasing.Meanwhile,the transmission peak at 358 nm demonstrates a noticeable blueshift and its intensity strengthens continuously.The change of Al component x has a significant effect on the peak position of the transmission peak in the longer ultraviolet band and the peak transmission in the shorter ultraviolet band.If the periodic structure of the nanopore array keeps unchangeable,the two prominent transmission peaks appear near 244 nm and 347 nm,respectively,as the air column apertures enlarge.Remarkably,these dual peaks initially undergo a red-shift,followed by a blue-shift,while the transmission steadily increases and the reflectivity decreases.The change in aperture size can significantly affect the peak transmission,and by controlling the aperture size appropriately,the transmission intensity can be significantly enhanced.With the expansion of the period,the two strong transmission peaks are located at 249 nm and 336 nm,respectively,and the two transmission peaks show obvious red-shift.The former transmission peak is redshifted to 304 nm,and the latter one is redshifted to 417 nm.Moreover,the transmissions at these peaks continue to decrease.The change in period can significantly affect the central wavelength of the transmission peak,and the periodicity of the array plays a dominant role in modulating the peak position in a large wavelength range.As Al thickness increases,a blue-shift of the transmission peak occurs at 380 nm,and the transmission decreases continuously.The change in thickness significantly affects the transmission intensity of the transmission peak in the longer ultraviolet band and the visible light region,but it is not so pronounced as the effect of aperture size on transmission intensity.Through reasonable design and optimization of structural parameters of Al nanopore array/(Al_(x)Ga_(1-x))_(2)O_(3),the peak position of transmission peak can be effectively regulated and the extraordinary transmission in ultraviolet band can be achieved.