摘要
针对某企业芯片制造生产过程产生的氨氮废水、含氟废水、减薄硅片废水以及酸碱废水等进行研究,设计出合理的废水处理工艺,确保废水在处理之后能达到排放标准,为生产车间稳定生产提供有效保障。
In this paper,ammonia-nitrogen wastewater,fluoride wastewater,thinning-scratching wastewater,and acid-alkali wastewater from the chipmaking process of an chip semiconductor factory have been researched,and logical wastewater treatment process have been designed,to guarantee wastewater can meet emission standard and provide effective support for stable production in the production workshop.
作者
谢先思
Xie Xiansi(Guangdong New Dayu Environmental Technology Co.,Ltd.,Guangzhou Guangdong 510000,China)
出处
《山西化工》
CAS
2024年第10期246-249,共4页
Shanxi Chemical Industry
关键词
半导体
氨氮废水
含氟废水
减薄划片废水
酸碱废水
处理工艺
排放标准
semiconductor
ammonia-nitrogen wastewater
fluoride wastewater
thinning-scratching wastewater
acid-alkali wastewater
treatment process
emission standard