摘要
扫描隧道显微镜(STM)作为纳米科技中最为有效和重要的检测加工手段之一,其应用随着纳米科技热的兴起而日益引起人们的重视。本文简述了STM·IPC-205B型机的工作原理及应用,以具体实例的STM扫描图像说明STM具有广阔的应用前景。
Scanning Tunneling Microscope(STM),one of the most effective and important means of testing and processing in nanometer technology,is receiving ever-increasing popularity in its application with the coming of nanometer technology.In this paper,the principle and application of STM are described.The scanning imaging of some materials indicates the wide use of STM in the future.
出处
《微纳电子技术》
CAS
2003年第6期39-42,共4页
Micronanoelectronic Technology