非对称磁透镜物镜的数字计算

Numerical calculation of asymmetrical magnetic electron objective lens

采用数字化电子光学设计软件计算了扫描电子显微镜 (SEM)物镜的光学特性并能在满足给定的条件下优化物镜设计。本文通过采用已发表的通用数据和用软件计算实际透镜得到的数据来计算电子束斑直径 ,研究非对称透镜物镜的光学特性。

Using the numerical software to calculate optical properties of asymmetrical magnetic electron objective lens, the optimum design can be obtained under certain requirements. The calculation of probe diameter was carried out by using the data from analytical and numerical methods in this paper. The results and data comparison were gathered in graphs and tables which were used in a scanning electron microscope experiment of the Institute of Applied Physics, University of Tuebingen, Germany.