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Maskless Microscopic Lithography through Shaping Ultraviolet Laser with Digital Micro-mirror Device

Maskless Microscopic Lithography through Shaping Ultraviolet Laser with Digital Micro-mirror Device
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摘要 Laser shaping was introduced to maskless projection soft lithography by using digital micro-mirror device (DMD). The predesigned intensity pattern was imprinted onto the DMD and the input laser beam with a Gaussian or quasi-Gaussian distribution will carry the pattern on DMD to etch the resin. It provides a method of precise control of laser beam shapes and?photon-induced curing behavior of resin. This technology provides an accurate micro-fabrication of microstructures used for micro-systems. As a virtual mask generator and a binary-amplitude spatial light modulator, DMD is equivalent to the masks in the conventional exposure system. As the virtual masks and shaped laser beam can be achieved flexibly, it is a good method of precision soft lithography for 2D/3D microstructures. Laser shaping was introduced to maskless projection soft lithography by using digital micro-mirror device (DMD). The predesigned intensity pattern was imprinted onto the DMD and the input laser beam with a Gaussian or quasi-Gaussian distribution will carry the pattern on DMD to etch the resin. It provides a method of precise control of laser beam shapes and?photon-induced curing behavior of resin. This technology provides an accurate micro-fabrication of microstructures used for micro-systems. As a virtual mask generator and a binary-amplitude spatial light modulator, DMD is equivalent to the masks in the conventional exposure system. As the virtual masks and shaped laser beam can be achieved flexibly, it is a good method of precision soft lithography for 2D/3D microstructures.
机构地区 [ Department of Physics
出处 《Optics and Photonics Journal》 2013年第2期227-231,共5页 光学与光子学期刊(英文)
关键词 DIGITAL Micro-mirror DEVICE (DMD) Laser SHAPING MASKLESS Projection Soft LITHOGRAPHY Digital Micro-mirror Device (DMD) Laser Shaping Maskless Projection Soft Lithography
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