摘要
相比于传统的以硅、碳化硅为振膜的电容式超声换能器CMUT(capactive micro-machined ultrasonic transducer),Ti_(3)C_(2)T_(x)作为振膜对CMUT的性能有很好的提升。为研究此振膜的CMUT性能,设计了与传统换能器结构略有不同且谐振频率为28kHZ的CMUT,并进行了有限元仿真分析及实验。仿真结果表明,其在谐振频率下的接收灵敏度为-23.28 dB,对制作的实物进行实验测试,结果表明所设计换能器具有良好的发射与接收性能。
Utilizing Ti_(3)C_(2)T_(x)thin film as the diaphragm in capacitive ultrasonic transducer(CMUT)significantly enhances their performance compared to traditional silicon and silicon carbide diaphragms.This study explores the performance of CMUTs with Ti_(3)C_(2)T_(x)diaphragms.Finite element simulation and experimental analysis are conducted on a traditional CMUT with a 28kHz resonant frequency.Structural parameters,collapse voltage,and resonance frequency are calculated and verified through COMSOL simulations.The designed transducer demonstrates a collapse voltage of 770 V and a resonance frequency of 28 kHz,with a receiving sensitivity of-23.28 dB at resonance.Experimental tests confirm the transducer′s excellent transmission and reception performance.
作者
袁伟立
郭新华
YUAN Weili;GUO Xinhua(School of Mechanical and Electronic Engineering,Wuhan University of Technology,Wuhan 430070,China)
