氢终端金刚石半导体电学特性测量有效性影响因素分析

Analysis of Influencing Factors of Electrical Characteristics Measurement Effectiveness of Hydrogen Terminated Diamond

本文对基于霍尔效应的氢终端金刚石半导体电学特性测量有效性影响因素进行讨论,并提出相应改善措施,使氢终端电学特性测量结果更为准确地为器件研制工作服务,同时也有助于氢终端金刚石半导体电学特性测量标准的建立。

This paper discusses the influencing factors of the effectiveness of the measurement of the electrical characteristics of hydrogen-terminated diamond based on the Hall effect.The corresponding improvement measures are proposed to improve the measurement accuracy.It is helpful for the establishment of the standard for measuring electrical properties of hydrogen terminal diamond.