摘要
文章针对不能采用DI机的自动系数直接拉伸或不平移set的分段固定系数拉伸的问题,研究发现导致外层拒曝和图形偏移的根本原因是基板涨缩与曝光资料系数不匹配,从而开发出了DI机自动平移+拉伸功能,实现了DI机测量基板涨缩后机器自动选择并制作曝光资料,从根本上解决了外层拒曝和图形偏移问题,使拒曝率和图形偏移报废率分别降低了16.18%、2.18%。
Aiming at the problem that the automatic coefficient of DI machine can’t be directly stretched or the piecewise fixed coefficient stretching without translation set,and through discussion,it is found that the root cause of the exposure refusal and blind via out of annular ring is the mismatching between expansion and shrinkage of the board and exposure data scaling,so the automatic translation and stretch function of DI machine is developed,which realizes the automatic selection and production of exposure data after DI machine measures the substrate expansion and contraction.The problems of outer layer exposure rejection and graphics offset are fundamentally solved,and the exposure rejection rate and graphics offset scrap rate are reduced by 16.18%and 2.18%respectively.
作者
刘幸
罗郁新
吴裕忠
Liu Xing;Luo Yuxin;Wu Yuzhong
出处
《印制电路信息》
2023年第S01期15-22,共8页
Printed Circuit Information
关键词
拒曝
图形偏移
系数不匹配
DI机自动平移+拉伸功能
Exposure Refusal
Blind Via Out of Annular Ring
Substrate Expansion Coefficient Mismatch
DI Automatic Translation(parallel moving)and Stretch Function