基于超弹性体材料的微型光纤法珀压力传感器

Miniature optical fiber Fabry-Perot pressure sensor based on hyper-elastic material

针对体内介入式医疗应用需求,提出一种基于超弹性体材料的微型光纤法珀压力传感器设计与制作方法。通过理论分析建立了适合超弹性体硅橡胶材料的Mooney-Rivlin力学仿真模型,对不同组分、厚度感压材料的受压变形状态进行了理论分析,并获得优化的传感器材料及结构参数。进一步提出微型光纤法珀压力传感器的制作方法,通过感压性能测试、温度影响测试和体外血液压力测试,对比验证了不同参数传感器的感压性能。结果表明,在感压材料直径180μm、厚度250μm时,测压范围0~40 kPa内传感器的压力灵敏度达到154.56 nm/kPa,20℃~50℃大温度范围内引起的压力测量相对误差仅为0.36%,温度对压力测量的影响完全可忽略。相比传统膜片式光纤压力传感器,基于超弹性体材料的微型光纤法珀压力传感器不仅尺寸小、灵敏度高,还具有成本低、方便制作的技术优势。

A design and fabrication method of miniature optical fiber Fabry-Perot pressure sensor based on hyper-elastic material is proposed to meet the needs of vivo interventional medical applications.Through theoretical analysis,a Mooney-Rivlin mechanical simulation model suitable for hyper-elastic silicone rubber material is formulated.The compression deformation state of pressure sensing materials with different components and thickness is theoretically analyzed,and the optimized sensor materials and structural parameters are obtained.The fabrication method of the sensor is further proposed,and the pressure-sensing performance of the sensor is evaluated by the pressure-sensing performance test,temperature influence test and the in vitro blood pressure test.The results show that when the diameter of the pressure-sensing material is 180μm and the thickness is 250μm,the pressure sensitivity of the sensor within the pressure measuring range of 0~40 kPa reaches 154.56 nm/kPa,and the relative error of pressure measurement caused by a large temperature range of 20℃~50℃is only 0.36%.The influence of temperature on pressure measurement is completely negligible.Compared with the traditional diaphragm optical fiber pressure sensor,the miniature optical fiber Fabry-Perot pressure sensor based on the hyper-elastic material is not only small in size,high in sensitivity,but also has the technical advantages of low cost and convenient fabrication.