新型高温薄膜热流传感器的研制

Development of a new type of high temperature thin film heat flux sensor

航天飞行器在返回地球大气层时外表面会产生兆瓦级的热流,瞬时温升可达1 800℃,为了保证飞行器的稳定安全运行,准确实时测量飞行器热防护系统表面热流具有非常迫切和重要的意义。针对高温热流检测的技术难题,提出了一种引线与基底一体化的新型热流传感器结构。结合陶瓷烧结静压成型和磁控溅射技术,通过在嵌入PtRh6引线的99氧化铝陶瓷基底端面依次沉积PtRh30-PtRh6热电堆薄膜、Al_(2)O_(3)薄膜、ZrO_(2)薄膜,研制了一款新型高温薄膜热流传感器,并对热流传感器进行了静态、动态性能、耐高温及重复性测试。结果表明,所研制的传感器灵敏度可达0.01μV/(W/m^(2))以上,传感器动态响应时间为3.97 s,对传感器进行1200℃高温实验,结果显示传感器经历高温前后输出信号无明显变化,传感器最大重复性误差为2.38%。所研制的高温薄膜热流传感器可为高温热流测量和热防护系统优化提供科学依据。

When the spacecraft reenters the earth atmosphere, the outer surface of spacecraft will generate megawatt of heat flux. As a result, the instantaneous temperature rise can reach 1800℃. In order to ensure the stability and safety of the spacecraft, it is significantly important to accurately measure the heat flux on the thermal protection system surface of the spacecraft in real time. Aiming at the technical difficulty of heat flux measurement in high-temperature condition, a novel heat flux sensor structure integrating the lead and substrate is proposed. Combining the ceramic sintering static pressing molding and magnetron sputtering technologies, a new high temperature thin film heat flux sensor was developed by sequentially depositing PtRh30-PtRh6 thermopile thin film, Al_(2)O_(3) film and ZrO_(2) film on the substrate surface of 99 alumina ceramics where the PtRh6 leads are embedded. Then, the static and dynamic performance, high-temperature resistant and repeatability tests were conducted. The result shows that the sensitivity of the sensor reaches better than 0.01 μV/(W/m^(2)), the dynamic response time is 3.97 s. High temperature test at 1200℃ was conducted on the sensor, the test result shows that the output signal of the sensor has no obvious change before and after the high temperature test, and the maximum repeatability error is 2.38%. The developed high temperature thin film heat flux sensor can provide scientific basis for the high temperature heat flux measurement and thermal protection system optimization.