一种液压油多污染物微检测传感器设计及研究

Design and research of a micro-sensor for multi-pollutant detection in hydraulic oil

基于微流体芯片技术提出了一种液压油微传感器。微传感器由内嵌硅钢片的平面电感检测线圈与对置硅钢片构成。电感检测模式下对金属颗粒进行检测,电容模式下检测水滴与气泡,实现了对油液中铁磁性颗粒、非铁磁性颗粒、水滴、气泡4种污染物的区分检测。通过实验证明新型结构的微传感器在电感模式下对金属颗粒检测精度的提高,并可以检测到油液中28μm的铁颗粒与85μm的铜颗粒;在电容模式下验证了微传感器在激励电压为2 V、激励频率为0.9 MHz时检测效果最好,并能检测到油液中95μm的水滴和160μm的气泡。该研究在对液压系统的故障预测和故障诊断有着十分重要的意义。

A hydraulic oil micro sensor is designed, which is based on the microfluidic chip technology. The microsensor consists of an inductive sensor embedded in silicon planar coils opposing silicon. Metal particles are detected in the inductance detection mode. Water droplets and bubbles are detected in the capacitance mode. Four kinds of pollutants in the oil can be distinguished, which are ferromagnetic particles, non-ferromagnetic particles, water droplets and bubbles. Experiments verify that the new structure of the micro sensor improves the detection accuracy of metal particles in the inductive mode. It can detect 28 μm iron particles and 85 μm copper particles in the oil. In the capacitance mode, the micro sensor has the best detection effectiveness when the excitation voltage is 2 V and the excitation frequency is 0.9 MHz. In addition, it can detect 95 μm water droplets and 160 μm bubbles in the oil. This research is great significant for failure prediction and diagnosis of hydraulic systems.