一维光子晶体无序膜厚扰动的分析及优化

Experimental analysis and compensation method of one-dimensional photonic crystal with disordered film thickness perturbation

基于一维周期性光子晶体模型,引入服从高斯分布的无序扰动,形成周期性无序扰动的薄膜模型,研究膜厚微扰对纳米光子器件性能的影响.通过分析周期数和两种材料厚度对光学特性的影响,提出在周期性光子晶体中,同一个周期内一种材料的厚度误差可用另一种材料的厚度来弥补,从而得到稳定的禁带中心位置和禁带宽度.理论和实验结果均验证了此补偿方案可以削减相关厚度偏差的累积,同时降低制备精度要求,减小实验值和理论值的偏差.

In order to study the effect of film thickness perturbation on the performance of nanophotonic devices,this paper designs a periodic disordered photonic crystal model by introducing disordered perturbations obeying Gaussian distribution.By analyzing the influence of the cycles number and the thickness of two materials on the optical properties,an optimization scheme for compensating the film thickness disturbance is proposed.The thickness error of one material in the same period is compensated by the thickness of the other material.This compensation provides a stable forbidden center position and a forbidden band width.Both theory and experiments have verified that this compensation scheme can reduce the accumulation of thickness deviation.Our method reduces both the requirements for preparation accuracy and the deviation of experimental and theoretical values.