线纹尺测量方法研究

Research on measuring method of line ruler

使用传统方法对小尺寸线纹尺的校准具有速度慢、自动化程度低的缺点;对大尺寸线纹尺的校准,安装繁琐,精度不易保证。针对这些问题,提出了基于光学三坐标测量小尺寸线纹尺,基于激光干涉比长仪测量大尺寸线纹尺的方法。分别对两种测量方法的测量原理、过程进行了研究,并对校准结果进行了不确定度的分析与评定,通过与国家院的数据比对对测量结果进行了验证。两种方法的结合,既保证了测量的精度、效率,又扩展了测量的范围,保证测量尺寸的完整性,对实际工作的开展具有指导意义。

The calibration of small size line ruler by traditional method has the disadvantages of slow speed and low automation.Calibration of large size line ruler is cumbersome to install and accuracy is not easy to ensure.To solve these problems,a new method based on optical CMM for measuring small size line ruler and laser interferometer for measuring large size line ruler is proposed.The measurement principle and process of the two measurement methods are studied,and the uncertainty of the calibration results is analyzed and evaluated,the measurement results are verified by comparing with the data from national Institute.The combination of the two methods not only ensures the accuracy and efficiency of measurement,but also expands the measurement range,Ensure the integrity of measurement dimensions,which has guiding significance to the practical work.