MEMS领域新国际提案综述

Review of New International Standard Proposals in MEMS Field

MEMS技术涉及物理学、半导体、光学、电子工程、化学、材料工程、机械工程、医学、信息工程及生物工程等多种学科和工程技术,具有体积小、重量轻、功耗低、价格低、集成度高、可批量制造等优点,在消费电子、汽车电子、工业控制、健康医疗和航空航天等领域开拓了广阔的市场和应用。本文介绍了MEMS领域的国际标准情况,以及近期由我国牵头制定的4项MEMS领域新国际提案的背景和内容,为MEMS领域的国际标准化工作奠定基础。

MEMS technology involves physics,semiconductor,optics,electronic engineering,chemistry,material engineering,mechanical engineering,medicine,information engineering,biological engineering and other disciplines and engineering technologies.It has the advantages of small size,light weight,low power consumption,low price,high integration and mass manufacturing,and has developed broad markets and applications in the areas such as consumer electronics,automotive electronics,industrial control,healthcare and aerospace.This paper introduces the international standards of MEMS,as well as the background and content of four new international standard proposals led by China,laying a foundation for the international standardization work of MEMS.