集成电路封装关键设备远程运维预测性维护标准研究

Research on Standards for Predictive Maintenance of Remote Operation and Maintenance of Key Equipment in Integrated Circuit Packaging

为解决由于标准缺失而导致的维预测性维护流程不清晰、预测模型构建不规范、关键参数选取标准不统一、导致预测结果不准确等问题,本文在分析集成电路封装关键设备远程预测性维护标准需求和国内外标准现状的基础上,开展集成电路封装关键设备远程运维预测性维护标准研究,包括基本流程要求、数据采集与处理要求、状态监测要求、故障模式识别要求、维修决策优化要求,并介绍了项目研究过程中突破的一些关键技术。

In order to solve the problems caused by the lack of standards,such as unclear process of dimensional predictive maintenance,nonstandard construction of prediction model,inconsistent selection standards of key parameters,and inaccurate prediction results,this paper analyzes the requirements of the standards on remote predictive maintenance for key equipment of integrated circuit packaging and the status quo of those standards at home and abroad,carries out the research on standards for predictive maintenance of remote operation and maintenance of key equipment of integrated circuit packaging including general requirements,data acquisition and processing requirements,condition monitoring requirements,fault pattern recognition requirements and maintenance decision optimization requirements,and introduces some key technological breakthrough in the project research process.