半导体工业原材料分析检测技术现状与进展

Status and progress of raw material analysis and detection technology in semiconductor industry

半导体是一种固体材料,其电导率随着温度在绝缘体和导体之间变化,包含基于硅或锗的经典半导体、砷化镓或磷化铟(Ⅲ-Ⅴ半导体)第二代半导体及碳化硅、氮化镓化合物的新型半导体。半导体元件的特性可通过半导体材料的选择和有针对性的改性(掺杂、注入)进行优化,结合复杂的工艺方法(光刻、绝缘层沉积、蚀刻工艺),几乎可制造出大部分电子设备中使用的电子元件(二极管、晶体管)。半导体元件的性能和使用寿命主要取决于生产所用原材料的纯度以及制造中工艺流程的精细度。因此,生产原材料的纯度与组成成分分析检测是半导体工业的关键环节。本文结合近年来国内外半导体工业原材料中的化学元素分析检测的发展情况进行论述,旨在对半导体制造行业提供技术参考,同时,为国产分析检测仪器行业的发展规划思路提供借鉴。

Semiconductor is a solid material whose conductivity alters between insulator and conductor with temperature.It includes classical semiconductors based on silicon,germanium,gallium arsenide,indium phosphide(III-V semiconductors),and some new organic semiconductors.Its performance can be optimized by modification(doping,implantation),accompanied by micro-nano fabrication(lithography,insulating layer deposition,etching processes),and almost all electronic devices(diodes,transistors)can be manufactured.The performance and lifespan of semiconductors are mainly determined by the purity of the raw materials and the process accuracy.Therefore,the detection and analysis of raw materials are significant in the semiconductor industry.This study discusses the developments of element analysis technologies in the semiconductor industry in the past ten years,to provide technical references for the semiconductor industry,and to support the domestic analytical instrument industry.