金属氧化物薄膜晶体管发展及其应用

Development and application of metal oxide thin film transistors

随着新型显示产品的快速发展,有源显示器对薄膜晶体管的性能要求越来越高。传统的非晶硅薄膜晶体管已不能满足新型显示器的高清晰、高亮度、柔性以及窄边(无边)框的需求,研究和开发新型薄膜晶体管成为了研究和产业界的重要课题之一。主要介绍了薄膜晶体管在新型显示技术中的研究背景;薄膜晶体管的发展历史以及近年来氧化物薄膜晶体管的研究进展和应用前景等内容。

With the rapid development of new display products,the requirements of thin film transistors for active displays are getting higher and higher.Traditional amorphous silicon thin film transistors are unable to meet the requirements of new displays,and new oxide thin film transistors have been more and more studied and applied.The research background,development history,research status and application prospects of thin film transistors are reviewed.In the research background,some new display technologies,such as ultra-high definition display,transparent display and flexible display are briefly introduced firstly.Secondly,the development history of thin film transistors is introduced.Then,the research progress of oxide thin film transistors in recent years is described in part.The application prospects of oxide thin film transistors will be prospected lastly.