金刚石半导体器件研究概述

Overview of research on diamond semiconductor devices

半个多世纪以来半导体基础材料经历了从锗、硅为代表的第一代,砷化镓、磷化铟为代表的第二代,碳化硅、氮化镓、氮化铝为代表的第三代的逐步演化。在演化过程中,更快响应,更高功率,更强稳定性始终是人们不断追求的目标。尽管现有半导体器件已经极大的推动了人类文明的进步且创造了巨大的价值,但是第四代半导体材料——金刚石展现出来的各种特性依旧使人欣喜和对未来充满信心。本文将概述现阶段金刚石半导体器件研究的进展,包括金刚石材料的制备,金刚石二极管、发光二极管、三极管、场效应管,金刚石传感器,金刚石微机械等等。

For more than half a century,semiconductor basic materials have evolved from the first generation represented by germanium and silicon,the second generation represented by gallium arsenide and indium phosphide,and the third generation represented by silicon carbide,gallium nitride and aluminum nitride.In the process of evolution,faster response,higher power,and stronger stability have always been the goals that people have been pursuing.Although the existing semiconductor devices have greatly promoted the progress of human civilization and created great value,the fourth generation of semiconductor materials-diamond shows various characteristics that still make people happy and confident about the future.In this paper,the research progress of diamond semiconductor devices at the present stage will be summarized,including the preparation of diamond materials,diamond diodes,light emitting diodes,triodes,field effect tubes,diamond sensors,diamond micromachines,and so on.