高灵敏度网状石墨烯微弱压力传感器的研究

Study on a High Sensitivity Mesh Graphene Weak Pressure Sensor

为了改善微弱压力传感器的灵敏度,利用微结构来产生压阻效应的方法,制备出一种性能优异的压力传感器。研究了三种不同结构的石墨烯压力传感器,并设计和研究了石墨烯压力传感器的版图结构、工艺制备流程和材料表征。最后,对三种不同结构的石墨烯压力传感器进行了灵敏度测试。实验结果表明,网状结构的石墨烯压力传感器具有较高的灵敏度,在低压强下(0~200 Pa)的灵敏度可达到0.303 kPa^(-1),最低可检测到24.5 Pa的压强。该网状结构的石墨烯压力传感器是一种可以感知微弱压力变化的高性能压力传感器。

In order to improve the sensitivity of weak pressure sensors,a pressure sensor with excellent performance was fabricated by using microstructure to produce piezo resistive effect.Three kinds of graphene pressure sensors with different structures were studied.The layout structure,process preparation and material characterization of graphene pressure sensors were designed and studied.Finally,the sensitivity of the three graphene pressure sensors with different structures was tested.The experimental results show that the graphene pressure sensor with network structure has high sensitivity,the sensitivity can reach 0.303 kPa^(-1)at low pressure(0-200 Pa),and the lowest pressure can be detected at 24.5 Pa.The graphene pressure sensor with network structure is a high performance pressure sensor that can sense weak pressure changes.