ISO 1级洁净室微环境气流组织模拟分析

Air Flow Simulation and Analysis of ISO 1 Class Mini-Environment in Clean Room

我国已经成为全球最大的集成电路市场,并且未来还将继续发展。由于电子厂房洁净室生产工艺的特殊性,空调设备能耗巨大,其节能具有重要意义。通过对现有空态ISO1级洁净室微环境进行模型简化,并通过数值模拟方法,分析得出了不同FFU运行风速及恒定风速下变FFU运行数量的气流组织特性。分析总结了降低FFU运行转速,可以做到单向流,实现降低能耗的目的;但是对于洁净度要求非常高的洁净室,不建议通过减少FFU运行数量去实现节能的目的。

China has been the global largest IC market and will continue developing in the future.Due to the process demand of the IC factory,its HVAC energy consumption is very huge.Thus,the energy saving of HVAC in the factory is definitely significant.By simplifying the model of as-built ISO 1 class mini-environment and using numerical simulation,the air distribution characteristics of different FFU operation speed and different quantity of operating FFU in the same running speed is analyzed in this article.Reducing the FFU running speed could still get unidirectional airflow and then decreasing the energy consumption,however,in the purpose of energy saving and then cutting down the running FFU quantity in the highly cleanliness clean room is not advised.