MEMS起爆器研究现状与发展趋势

Research Status and Development Trend of MEMS Detonators

随着微纳技术的广泛应用,以MEMS技术为支撑的新一代起爆器成为含能器件领域的研究热点。MEMS起爆器可以实现大规模高密度的集成制造,并且器件输出性能一致性较好,具有微型化、集成化、高能化的特征。MEMS起爆器按结构不同,可以分为爆炸箔结构、半导体桥结构以及多孔硅结构三大类。爆炸箔起爆器主要采用电爆炸原理,结构简单,安全性能较高。半导体桥起爆器起爆电压低,应用领域广泛,可通过增加含能材料来提高器件的能量输出。多孔硅起爆器反应活性高,与由碳氢氮氧组成的传统含能药剂相比,多孔硅含能材料的环境友好性更好。通过分析与对比MEMS起爆器的结构组成、起爆方式、制作工艺以及输出能量等方面,指出MEMS起爆器结构微型化、输出高能化、起爆可控化的特征,并提出能够兼顾高能性与安全性的MEMS起爆系统为未来重要的发展方向。

With the application of micro-nano technology,the new generation of detonators based on MEMS technology has become one of the research hot spots in the field of energetic devices.MEMS detonator can be realized by mass and highly intensive integrated fabrication,and the output performance is consistent,with the characteristics of miniaturization,integration and high-energy.Based on different structures,the MEMS detonator can be divided into three categories,which are explosive foil,semiconductor bridge(SCB)and porous silicon.The explosive foil MEMS detonator has simple structure and is highly safe.SCB MEMS detonator has a broader application field,and can be initiated by low voltage.By adding energetic materials,the output energy of SCB can be improved drastically.Compared to traditional C-H-N-O energetic material,porous silicon is more active and environmental friendly.Through analyzing the composed structure,way of detonation,fabrication process and output performance,is points out that the miniature structure,high output energy and controllable detonation are the main characters of MEMS detonator,and proposes the MEMS detonation system,which can balance the high output energy and high safety,is an important development direction of MEMS detonator.