高电压微型超级电容器的制造方法及研究进展

Manufacturing Methods and Research Progress of High Voltage Micro-supercapacitors

在微电子和微机械的高压应用中,如微型机器人、软致动器、皮肤电子、微型传感器和集成电子电路等,迫切需要高输出电压的储能/补给装置。近年来,高电压微型超级电容器(High voltage micro-supercapacitors,HVMSCs)因其微小型、便携式、柔韧性、高循环寿命及高功率/能量密度等优势而频繁作为功率补给装置应用到微机电系统,可满足一定范围的电压输出和能量供给,并且HVMSCs在电路中可作为储能器件应用可使电子产品更有可能趋向于集成式、高密度以及小型化。现有研究表明,增大MSCs的工作电压窗口,可以显著提升MSCs的输出能量密度,进而能最大限度地扩展其应用场合。因此,如何从材料、结构以及制造方法方面着手,制备全固态HVMSCs成为研究热点。基于此,首先对MSCs的电荷存储机制及电化学性能特征进行概述,其次分析高电压MSCs的实现原理,接着详细归纳HVMSCs的制造方法,主要包括高电压电极材料的制备(碳基材料、过渡金属氧化物、导电聚合物以及复合电极材料)以及高电压封装结构的制造(激光加工、喷墨打印、3D打印、丝网印刷、卷对卷印刷以及掩膜涂层),并且总结HVMSCs在储能功率器件、柔性传感以及可穿戴设施等方面的应用。在综合探讨HVMSCs的研究现状的基础上,最后对其在可穿戴和便携式电子设备等高电压领域的研究趋势和发展前景进行相应的展望。

In the high voltage applications of microelectronics and micro-mechanics,such as micro robots,soft actuators,skin electronics,micro sensors,integrated electronic circuits and so on,energy storage/supply devices with high output voltage are urgently needed.In recent years,high voltage micro-supercapacitors(HVMSCs),acting as power supply devices and due to their advantages of miniaturization,portability,flexibility,high cycle life span and high specific power/energy density,have been widely used in microcircuit systems,which can meet high voltage output and energy supply.In addition,HVMSCs can be used as energy storage devices to replace the large electrolytic capacitors and batteries,making electronic products more likely to be integrated construction,high density and miniaturization.According to the existing research,the increase on operating voltage window of MSCs can significantly improve the output energy density of MSCs,and further expand its application.Therefore,how to prepare all solid-state HVMSCs from the aspects of materials,structures and manufacturing methods has become a research hotspot.Based on this,the charge storage mechanism and electrochemical performance characteristics of MSCs are surveyed firstly.Secondly,the implementation principles on high potential window of MSCs are analyzed.Then,the manufacturing methods of HVMSCs are concluded in detail,comprising the preparation of electrode materials with high voltage(carbon-based materials,transition metal oxides,conductive polymers and composite electrode materials)and the manufacturing of high-voltage packaging structures(laser processing,inkjet printing,3D printing,screen printing,roll to roll printing and mask coating).In addition,the applications of HVMSCs in energy storage power devices,flexible sensors and wearable devices are summarized.Finally,based on comprehensive investigation in research status of HVMSCs,the research trend and development of HVMSCs in high voltage fields,such as wearable and portable electronic devices,is prospected.