回转体表面掩膜微细电解加工有限元分析及试验研究

Finite-element simulation and experimental study on the mask micro electrochemical machining of the revolving surface

针对在回转体零件表面加工微织构的难题,文中建立了回转体表面微细电解加工的多物理场耦合数学模型,利用COMSOL Multiphysics软件进行了仿真求解。设计了掩膜电解加工专用夹具和电解液系统,优化了电解液的流道结构,在较低加工电压和较短加工时间的条件下,开展了工艺试验。通过对比分析微坑深度的仿真值和测量值,验证了加工过程多物理场耦合仿真模型的准确性,得到了形状精度高、均匀排布的直径为φ200μm的微坑阵列,为在回转体表面加工微织构提供了一种合理有效的方法。

For the micro-texture machining on the revolving surface,a multi-physic coupling mathematical model is set up in this article.COMSOL Multiphysics is adopted for simulation.Both the special fixture and the electrolyte system for ECM are worked out,and the electrolyte’s flow channel is optimized.With lower processing voltage and shorter processing time,a series of process tests are carried out.By comparing the simulated and measured values of the micro pit depth,the accuracy of the multi-physic coupling mathematical model in the machining process is verified.The micro crater array characterized by precise shape and uniform layout as well as with the diameter ofφ200μm is identified.It serves as a reasonable and effective method for the micro-texture machining on the revolving surface.