摘要
分析表明,我国半导体工厂的生产规模逐步扩大,生产所需的设备也愈发先进,这就对半导体厂的运营安全提出了更高的要求。结合集成电路制造工厂的典型结构、工艺流程,阐述芯片制造工厂运营的安全风险量化评估方法。
The analysis shows that the production scale of China’s semiconductor factories is gradually expanding,and the equipment required for production is becoming more and more advanced,which puts forward higher requirements for the operation safety of semiconductor plants.In this paper,the risk assessment method of integrated circuit manufacturing process is described.
作者
聂静
NIE Jing(Fujian Electronic Information Group,Fujian Jinhua Integrated Circuit Co.,Ltd.,Fujian 362200,China)
出处
《电子技术（上海）》
2020年第9期18-19,共2页
Electronic Technology
关键词
集成电路制造
芯片工厂
安全风险
量化评估
integrated circuit manufacturing
chip factory
safety risk
quantitative assessment
