在片测试中的射频校准技术

RF Calibration Technology in Wafer Level Testing

在片测试是当前测试评价射频器件电学特性参数的主要手段,而射频校准是对射频器件开展测试评价的重要环节,校准技术是提高射频测试准确性的重要技术。介绍校准的概念,校准的设备和配件,列举并分析当前主要应用的校准方法,以实例介绍了校准的基本流程和结果比较。

Wafer level testing is the main method to test and evaluate the electrical characteristics of RF devices.And the RF calibration is an important part of testing and evaluation of RF devices,and is also an important prerequisite for accurate testing.This paper briefly introduces the significance of calibration,the equipment and accessories to carry out calibration,lists and analyzes the current main calibration methods,and finally introduces the basic process of calibration and the gives an example and compares the results.