摘要
根据运动台的结构模型,提出运动台系统建模与优化方法,并将建模仿真结果与实际测试结果进行比对。结果表明仿真模型基本上能体现运动台系统的结构动态特性,从而验证仿真模型的准确性。
According to the structure model of the motion table,this paper puts forward the modeling and optimization method of the motion table system,and compares the simulation results with the actual test results.The results show that the simulation model can basically reflect the structural dynamic characteristics of the motion platform system,so as to verify the accuracy of the simulation model.
作者
陈文枢
CHEN Wenshu(Shanghai Micro Electronics Equipment(Group)Co.,Ltd,Shanghai 201203,China)
出处
《电子技术（上海）》
2019年第1期44-46,共3页
Electronic Technology
基金
上海市高科技企业技术创新课题项目.
关键词
集成电路制造设备
光刻机
运动台
系统建模
integrated circuit manufacturing equipment
lithography machine
motion table
system modeling
