微纳测量机靶镜正交偏差角测量不确定度评定

Measurement uncertainty evaluation of the orthogonal deviationangles of the target mirror of micro/nano measuring machine

三维靶镜是微纳米坐标测量机系统中的重要组成部分,其各面间正交性对保障系统测量精度至关重要。为检验三维靶镜加工是否符合测量机精度要求,对三维靶镜正交偏差角进行测量及不确定度评定,在量值特性分析建模基础上,研究了测量不确定度表示指南传统方法(称为GUM法)、蒙特卡洛方法(MCM)及自适应蒙特卡洛方法(AMCM)3种测量评定方法。测量评定结果对比表明,三维靶镜加工精度基本符合预期要求,其中Z-X面和Y-Z面的面间夹角均为0.5″左右,X-Y面间夹角在3.3″左右;3种方法所得评定结果基本一致,MCM和AMCM较GUM法评定结果更合理,AMCM相对MCM更高效。所做工作为后续研究微纳米坐标测量机面向任务的测量不确定度评定提供了借鉴方法。

The 3D target mirror is a vital part of micro/nano coordinate measuring machine system.The orthogonality between its any two mirror planes is very important to ensure the measurement accuracy of the measuring machine system.In order to verify whether the 3D target mirror meets the accuracy requirement of the measuring machine,the orthogonal deviation angles of the 3D target mirror are measured and the measurement uncertainties are evaluated.On the basis of quantitative characteristic analysis and modeling,the traditional method(called as GUM method)given in the guide to the expression of uncertainty in measurement,Monte Carlo method(MCM)and adaptive Monte Carlo method(AMCM)are researched.The comparison of the measurement evaluation results shows that the 3D target mirror approximately meets the accuracy requirement of the measuring machine.The orthogonal deviation angles of Z-X mirror planes and Y-Z mirror planes are about 0.5″,and the orthogonal deviation angle of X-Y mirror planes is about 3.3″.The evaluation results obtained by the three methods are basically consistent.Moreover,MCM and AMCM are more reasonable than GUM,and AMCM method is more efficient than MCM method.This work provides reference methods for the task-oriented measurement uncertainty evaluation of micro/nano CMM.