摘要
干涉图像中反映齿面形貌信息的齿面域被背景噪声包围,其分割精度对相位解包裹、图像配准等后续的处理步骤存在较大的影响,直接关系到最终测量结果的精度。针对齿面干涉图像边界存在杂散条纹的现象,通过分析齿面干涉条纹的分布规律,提出了一种结合Butterworth滤波和Haar小波的齿面域分割方法。最后,在本文实验条件下,通过与时域分割方法进行对比,该方法可以将齿面干涉图像的边界杂散条纹区域内解包裹相位值有错误的地方排除在有效测量区域外并且能够对其进行有效校正,证明了基于频域信息的分割方法能够有效地提高干涉图像齿面域分割的精度。
The tooth flank region that reflects the tooth flank shape information in the interferogram is surrounded by background noise,and its processing accuracy has a great impact on the subsequent processing steps such as phase unwrapping and the interferogram registration,which is directly related to the accuracy of the final measurement result.Aiming at the phenomenon that there are spurious fringes in the boundary of tooth flank interferogram,a tooth flank region segmentation method combining Butterworth filter and Haar wavelet is proposed by analyzing the distribution of tooth flank interferogram fringes.Finally,under the experimental conditions of this paper,it shows that the proposed method can exclude and correct the wrong phase values of the unwrapping in the boundary spurious fringe regions of the tooth flank interferogram from the valid measuring region by comparing with the time-domain segmentation method,which proves that the method based on the frequency domain can effectively improve the accuracy of the segmentation of the tooth flank region of the interferogram.
作者
余子健
杨鹏程
连力平
肖渊
朱新栋
Yu Zijian;Yang Pengcheng;Lian Liping;Xiao Yuan;Zhu Xindong(College of Mechanical and Electrical Engineering,Xi'an Polytechnic University,Xi'an 710048,China;Ministry of Education Key Laboratory for Nonequilibrium Synthesis and Modulation of Condensed Matter,School of Physics,Xi'an Jiaotong University,Xi'an 710049,China;Shaanxi Province Key Laboratory of Quantum Information and Quantum Optoelectronic Devices,School of Physics,Xi'an Jiaotong University,Xi'an 710049,China)
出处
《电子测量技术》
北大核心
2023年第2期184-192,共9页
Electronic Measurement Technology
基金
国家自然科学基金青年项目(51905412)
陕西省科技厅自然科学基础研究计划-面上项目(2022JM-219)资助