高灵敏度石英振梁加速度计的设计与仿真

Design and Simulation of Quartz Vibrating Beam Accelerometer with High-sensitivity

石英加速度计的关键结构尺寸直接影响着加速度计的灵敏度及量程等性能,因此在结构设计中至关重要。针对一种新型的石英振梁加速度计在关键结构尺寸的设计上所存在的盲目性及灵敏度普遍不高的问题,建立了石英振梁加速度计的结构力学模型,通过理论分析获取了影响加速度计灵敏度与量程的主要结构参数及其作用机理,有限元仿真结果验证了振梁及质量块的尺寸参数对加速度计性能的影响。在此基础上对整体结构参数进行优化,最终得到的石英振梁加速度计标度因数可达117Hz/g,测量范围为±50g。理论与仿真结果表明:通过结构优化所得到的尺寸参数合理,且加速度计的灵敏度明显提高,为石英振梁加速度计进一步的研究提供了有利的参考。

The key structure dimension of quartz accelerometer directly affects the sensitivity and range of the accelerometer,so it is crucial in the structure design.To deal with the problems of blindness and low sensitivity in the design of several key structure dimensions of a new type of quartz vibrating beam accelerometer,the structure mechanical model of quartz vibrating beam accelerometer is established,and the main structure parameters affecting the sensitivity and range of accelerometer and their action mechanism are obtained through theoretical analysis.The finite element simulation results verify the influence of the dimension parameters of vibrating beam and mass on the performance of the accelerometer.On this basis,the overall structure parameters are optimized.Finally,the scale factor of quartz vibrating beam accelerometer can reach 117 Hz/g and the measurement range is±50g.The theory and simulation results show that the dimension parameters obtained through structure optimization are reasonable,and the sensitivity of accelerometer is significantly improved,which provides a favorable reference for the further research of quartz vibrating beam accelerometer.