MEMS陀螺仪共振干扰机制及防护方案研究

Study on Resonance Interference Mechanism and Protection Scheme of MEMS Gyroscope

作为新型高性能、低成本、小尺寸惯性传感器,MEMS陀螺仪被广泛应用于消费电子、汽车工业、航空航天等领域。但由于结构特性,MEMS陀螺仪容易受共振干扰而失效,严重影响了其可靠性。通过推导MEMS陀螺仪在共振干扰下的动力学方程,理论分析了共振干扰失效机制,并利用共振干扰实验进行验证,还比较了声波和振动两种共振干扰的差异。随后,根据干扰机制,提出了远程可控干扰MEMS陀螺仪的方法。最后,提出了基于双路正交解调算法的共振干扰防护方案,并利用此方案实现了对共振干扰的预警。研究结果表明:MEMS陀螺仪在声波和振动两种共振干扰下的表现十分相似,利用远程可控干扰方法可以成功让陀螺仪输出指定波形,所提双路正交解调算法可以有效抑制共振干扰的影响。

As a new type of inertial sensor with high performance,low cost and small size,MEMS gyroscope is widely used in consumer electronics,automotive industry,aerospace and other fields.However,because of structural characteristics,MEMS gyroscope is prone to failure due to resonance interference,which seriously affects its reliability.In this paper,by deducing the dynamic equation of MEMS gyroscope under resonance interference,the failure mechanism of resonance interference is analyzed theoretically and verified by resonance interference experiment.In addition,the difference between acoustic and vibration resonance interference is also compared.Then,according to the interference mechanism,a method of remote controllable interference to MEMS gyroscope is proposed.Finally,a resonance interference protection scheme based on two-channel orthogonal demodulation algorithm is proposed,which is used to realize the early warning of resonance interference.The results indicate that the performances of MEMS gyroscopes are very similar under the two kinds of resonance interference of acoustic and vibration.Using the remote controllable interference method,the gyroscope can successfully output the specified waveform.The proposed two-channel orthogonal demodulation algorithm can effectively suppress the influence of resonance interference.