基于单晶压电薄膜异质衬底的射频声波滤波器研究进展

Recent Advances of Radio Frequency Acoustic Wave Filters Based on Piezoelectric Heterogeneous Substrates

在5G及未来6G无线通信系统中,射频(Radio Frequency,RF)前端技术被视为一项关键技术。而射频滤波器作为射频前端的核心部件,具有频率选择以及抑制干扰信号的功能,基于压电效应的声波滤波器凭借其性能、体积、工艺等优势已成为移动射频前端的主流选择。近几年,随着异质集成材料制备技术的突破,基于单晶压电薄膜异质衬底(如LiTaO_(3)/SiO_(2)/Si)的声表面波、体声波与板波滤波器技术屡有突破。结合当下研究热点,依次对单晶压电薄膜异质衬底的制备、声波器件仿真、声表面波与板波滤波器技术的研究进展进行介绍与分析,并对未来声波滤波器的发展做出展望。

The radio frequency(RF)front-end is regarded as a key technology in the fifth-generation(5 G)and the next generation(6 G)wireless communication systems.As the key component of RF front-ends,RF filter has the functions of frequency selection and interfering-signal suppression.Due to their advantages in performance,volume,and manufacturing process,acoustic wave filters based on piezoelectric effect have become the mainstream choice for RF front-ends.In recent years,with the development of the fabrication technology of heterogeneous integrated materials,surface acoustic wave,bulk acoustic wave and plate wave filters based on the hetero-integrated single-crystalline piezoelectric films(LiTaO_(3)/SiO_(2)/Si)have made continuous breakthroughs.Combined with the current research hotspot,the progress in the fabrication of piezoelectric heterogeneous substrates,the simulation of acoustic devices,and the development of surface acoustic wave and plate wave filters are introduced and discussed.Besides,the prospects for the development of acoustic wave filters are also predicted.