集成电路制造技术课程的改革探索

Course Construction of Integrated Circuit Layout Design

三江学院对集成电路制造技术课程进行了改革,利用项目化教学的方式开展集成电路工艺的虚拟仿真、器件的虚拟制造、器件电学特性的虚拟仿真等实践教学活动。项目化教学改变了传统的人才培养模式,利用软件进行器件的虚拟制造既可以增加学生的学习乐趣,又可以提升学生的实践能力。学生通过完成一个完整的MOS/VDMOS器件的虚拟制造项目,进一步提升了职业技能。该文介绍了集成电路制造技术课程的培养目标、课程体系改革探索,并进行了相应的课程改革总结。

Sanjiang University has reformed the integrated circuit manufacturing technology course and carried out practical teaching activities such as virtual simulation of integrated circuit process,virtual manufacturing of devices,virtual simulation of electrical characteristics of devices,etc.by using project-based teaching.This projectbased teaching has changed the traditional talent training mode and used software to carry out virtual manufacturing of devices.It can not only increase students'learning fun,but also improve their practical ability.Students can further improve their professional skills by completing a complete virtual manufacturing project of MOS/VDMOS devices.This article introduces the training objectives and curriculum reform exploration of integrated circuit manufacturing technology course,and summarizes the corresponding curriculum reform.