真空冷喷涂技术及其在功能器件中的应用

Vacuum Cold Spray Technology and Its Application in Functional Devices

真空冷喷涂作为一种有潜力的新型涂层制备工艺,已引起来自多个国家研究团队的关注。超细陶瓷或金属颗粒以数百米每秒或更高速度撞击基体与累加沉积,无需高温烧结,即可在室温下制备致密或多孔的纳米结构陶瓷涂层或金属涂层。该工艺具有材料适用广泛、成分不易发生变化、可直接快速制备复合材料以及多种结构涂层的优势。尤其是在功能陶瓷领域,真空冷喷涂有希望成为以烧结为基础的传统生产工艺的替代品。文中详细阐述了真空冷喷涂工艺的原理与特点、颗粒沉积行为和典型涂层形貌,并介绍了真空冷喷涂工艺在传感器(气体、湿度和温度)、能源器件(太阳能电池、燃料电池、锂离子电池和超级电容器等)、微机电系统(MEMS)器件、表面防护、生物涂层以及金属涂层等领域的应用和最新研究进展。最后对真空冷喷涂工艺的未来研究方向和应用领域进行了展望。

As a potential novel coating preparation process,vacuum cold spray(VCS)has attracted extensive interest from many countries’research teams.By impacting the substrate with ultrafine ceramic or metal particles at a velocity of hundreds of m/s or higher,without high-temperature sintering,the dense or porous nanostructured ceramic or metal coatings can be prepared at room temperature.VCS has the advantages of the widely available material,resistance to composition changes,direct and rapid preparation of composite materials and multiple structural coatings.Especially in the field of functional ceramics,VCS has the potential to replace traditional sinter-based production processes.In this paper,the principle and characteristics of VCS process,particle deposition behavior,and typical coating morphology are explained.The application and latest research progress of the VCS process in surface protection,biological coating,sensor applications(gas,humidity and temperature),energy devices(solar cells,fuel cells,lithium-ion batteries and supercapacitors),micro-electromechanical systems(MEMS)devices,and metal coatings are introduced in detail.Finally,the future research direction and application fields of the VCS process are pointed out.